JPH0487721U - - Google Patents
Info
- Publication number
- JPH0487721U JPH0487721U JP12807990U JP12807990U JPH0487721U JP H0487721 U JPH0487721 U JP H0487721U JP 12807990 U JP12807990 U JP 12807990U JP 12807990 U JP12807990 U JP 12807990U JP H0487721 U JPH0487721 U JP H0487721U
- Authority
- JP
- Japan
- Prior art keywords
- center
- suction port
- mist
- rectifier box
- mist collector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Separating Particles In Gases By Inertia (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12807990U JP2544655Y2 (ja) | 1990-11-30 | 1990-11-30 | ミストコレクタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12807990U JP2544655Y2 (ja) | 1990-11-30 | 1990-11-30 | ミストコレクタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0487721U true JPH0487721U (en]) | 1992-07-30 |
JP2544655Y2 JP2544655Y2 (ja) | 1997-08-20 |
Family
ID=31875554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12807990U Expired - Fee Related JP2544655Y2 (ja) | 1990-11-30 | 1990-11-30 | ミストコレクタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2544655Y2 (en]) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10216437A (ja) * | 1997-02-07 | 1998-08-18 | Showa Denki Kk | オイルミスト除去装置 |
JP2014046289A (ja) * | 2012-08-31 | 2014-03-17 | Nikki Co Ltd | 気体用フィルタ装置 |
JP2015080738A (ja) * | 2013-10-21 | 2015-04-27 | 東京エレクトロン株式会社 | トラップ装置及び基板処理装置 |
-
1990
- 1990-11-30 JP JP12807990U patent/JP2544655Y2/ja not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10216437A (ja) * | 1997-02-07 | 1998-08-18 | Showa Denki Kk | オイルミスト除去装置 |
JP2014046289A (ja) * | 2012-08-31 | 2014-03-17 | Nikki Co Ltd | 気体用フィルタ装置 |
JP2015080738A (ja) * | 2013-10-21 | 2015-04-27 | 東京エレクトロン株式会社 | トラップ装置及び基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2544655Y2 (ja) | 1997-08-20 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |