JPH0487721U - - Google Patents

Info

Publication number
JPH0487721U
JPH0487721U JP12807990U JP12807990U JPH0487721U JP H0487721 U JPH0487721 U JP H0487721U JP 12807990 U JP12807990 U JP 12807990U JP 12807990 U JP12807990 U JP 12807990U JP H0487721 U JPH0487721 U JP H0487721U
Authority
JP
Japan
Prior art keywords
center
suction port
mist
rectifier box
mist collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12807990U
Other languages
English (en)
Japanese (ja)
Other versions
JP2544655Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12807990U priority Critical patent/JP2544655Y2/ja
Publication of JPH0487721U publication Critical patent/JPH0487721U/ja
Application granted granted Critical
Publication of JP2544655Y2 publication Critical patent/JP2544655Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Separating Particles In Gases By Inertia (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP12807990U 1990-11-30 1990-11-30 ミストコレクタ Expired - Fee Related JP2544655Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12807990U JP2544655Y2 (ja) 1990-11-30 1990-11-30 ミストコレクタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12807990U JP2544655Y2 (ja) 1990-11-30 1990-11-30 ミストコレクタ

Publications (2)

Publication Number Publication Date
JPH0487721U true JPH0487721U (en]) 1992-07-30
JP2544655Y2 JP2544655Y2 (ja) 1997-08-20

Family

ID=31875554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12807990U Expired - Fee Related JP2544655Y2 (ja) 1990-11-30 1990-11-30 ミストコレクタ

Country Status (1)

Country Link
JP (1) JP2544655Y2 (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10216437A (ja) * 1997-02-07 1998-08-18 Showa Denki Kk オイルミスト除去装置
JP2014046289A (ja) * 2012-08-31 2014-03-17 Nikki Co Ltd 気体用フィルタ装置
JP2015080738A (ja) * 2013-10-21 2015-04-27 東京エレクトロン株式会社 トラップ装置及び基板処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10216437A (ja) * 1997-02-07 1998-08-18 Showa Denki Kk オイルミスト除去装置
JP2014046289A (ja) * 2012-08-31 2014-03-17 Nikki Co Ltd 気体用フィルタ装置
JP2015080738A (ja) * 2013-10-21 2015-04-27 東京エレクトロン株式会社 トラップ装置及び基板処理装置

Also Published As

Publication number Publication date
JP2544655Y2 (ja) 1997-08-20

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees